Invention Grant
US09520263B2 Method and apparatus for generation of a uniform-profile particle beam 有权
用于产生均匀轮廓粒子束的方法和装置

Method and apparatus for generation of a uniform-profile particle beam
Abstract:
The present invention pertains to an apparatus for generating a charged particle beam comprising a magnetic element for controlling the profile of the beam in a predetermined plane. A cathode can be provided for emitting charged particles and an anode for accelerating the charged particles along an axis of travel. The present invention also pertains to a method for generating a particle beam that has a uniform profile in a predetermined plane comprising inducing emission of charged particles from an emitter, accelerating those particles along and toward an axis of beam travel, generating a magnetic field with a component aligned with the axis of beam travel but different in the predetermined plane than at the emitter, and modifying the beam profile.
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