Invention Grant
US09524856B2 In-chamber fluid handling system and methods handling fluids using the same
有权
室内流体处理系统和处理使用其的流体的方法
- Patent Title: In-chamber fluid handling system and methods handling fluids using the same
- Patent Title (中): 室内流体处理系统和处理使用其的流体的方法
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Application No.: US14174677Application Date: 2014-02-06
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Publication No.: US09524856B2Publication Date: 2016-12-20
- Inventor: Shane Hilliard , Ciaran J O'Connor , Jay Wilkins , Erik Larsen , Leif Summerfield
- Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Main IPC: H01J49/04
- IPC: H01J49/04 ; G01N1/22 ; G01N1/38
Abstract:
A sample chamber is configured to accommodate a target such that a portion of the target is removable as a sample. A carrier gas injection system is configured to introduce a carrier gas into the sample region from a first position and a second position within the sample chamber such that at least a portion of the sample is entrainable by the carrier gas within the sample region. A portion of the sample region is located between the first position and the second position. A sample transport conduit is configured to transport at least a portion of the sample entrained by the carrier gas to a location outside the sample chamber.
Public/Granted literature
- US20140223991A1 IN-CHAMBER FLUID HANDLING SYSTEM AND METHODS HANDLING FLUIDS USING THE SAME Public/Granted day:2014-08-14
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