Invention Grant
- Patent Title: Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
- Patent Title (中): 通过调节和控制灯工作温度来减少热应力的方法和装置
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Application No.: US13975945Application Date: 2013-08-26
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Publication No.: US09534848B2Publication Date: 2017-01-03
- Inventor: Jincheng Wang , Anant Chimmalgi , Rajeev Patil , Erik Kim , Rudolf Brunner , Quang Giang , Lauren Wilson , Ken Gross , Ilya Bezel , Dan Scott , Younus Vora , Matthew Derstine , Cedric Lasfargues
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: F21V29/00
- IPC: F21V29/00 ; F28C3/04 ; F21V29/02 ; F21V29/503 ; F21V29/60 ; F21V19/00

Abstract:
A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.
Public/Granted literature
- US20140060792A1 Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures Public/Granted day:2014-03-06
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