公开(公告)号：US09534848B2

公开(公告)日：2017-01-03

申请号：US13975945

申请日：2013-08-26

Applicant: KLA-Tencor Corporation

Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

IPC: F21V29/00 ,  F28C3/04 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60 ,  F21V19/00

CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

公开(公告)号：US09110037B2

公开(公告)日：2015-08-18

申请号：US14521977

申请日：2014-10-23

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Younus Vora ,  Rudolf Brunner

IPC: G01N21/00 ,  G01N21/95 ,  G01N21/88 ,  G03F7/20 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845 ,  G01N2021/95676 ,  G01N2201/0612 ,  G03F7/70483

Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. At least some of the laser diode arrays form two dimensional stacks that have different wavelength ranges from each other. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.

Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 至少一些激光二极管阵列形成彼此具有不同波长范围的二维叠层。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。

公开(公告)号：US08896827B2

公开(公告)日：2014-11-25

申请号：US13924216

申请日：2013-06-21

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Younus Vora ,  Rudolf Brunner

IPC: G01N21/00 ,  G03F7/20 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845 ,  G01N2021/95676 ,  G01N2201/0612 ,  G03F7/70483

Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.

Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。

公开(公告)号：US20130342825A1

公开(公告)日：2013-12-26

申请号：US13924216

申请日：2013-06-21

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Younus Vora ,  Rudolf Brunner

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845 ,  G01N2021/95676 ,  G01N2201/0612 ,  G03F7/70483

Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.

Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。

公开(公告)号：US20150042979A1

公开(公告)日：2015-02-12

申请号：US14521977

申请日：2014-10-23

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Younus Vora ,  Rudolf Brunner

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845 ,  G01N2021/95676 ,  G01N2201/0612 ,  G03F7/70483

Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. At least some of the laser diode arrays form two dimensional stacks that have different wavelength ranges from each other. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.

Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 至少一些激光二极管阵列形成彼此具有不同波长范围的二维叠层。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。

公开(公告)号：US20140060792A1

公开(公告)日：2014-03-06

申请号：US13975945

申请日：2013-08-26

Applicant: KLA-Tencor Corporation

Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

IPC: F28C3/04

CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。