Invention Grant
US09535112B2 Temperature control apparatus and test system using main flow path and sub flow path 有权
温度控制装置和使用主流路和副流路的试验系统

Temperature control apparatus and test system using main flow path and sub flow path
Abstract:
Increase in number of valves complicates the configuration and control. A temperature control apparatus for controlling a temperature of a device, includes; a heat exchange section exchanging heat with the device; a main flow path causing a fluid to flow; a sub flow path causing, to flow, a fluid having a temperature different from a temperature of the fluid flowing through the main flow path; a mixture flow path merging the fluids from the main flow path and the sub flow path and causing the merged fluids to flow to the heat exchange section; and a flow rate adjusting section adjusting an amount of a fluid flowing from the sub flow path to the mixture flow path, in relation to the fluid flowing through the main flow path.
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