Invention Grant
US09535112B2 Temperature control apparatus and test system using main flow path and sub flow path
有权
温度控制装置和使用主流路和副流路的试验系统
- Patent Title: Temperature control apparatus and test system using main flow path and sub flow path
- Patent Title (中): 温度控制装置和使用主流路和副流路的试验系统
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Application No.: US14472398Application Date: 2014-08-29
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Publication No.: US09535112B2Publication Date: 2017-01-03
- Inventor: Hirotaka Sasaki , Tsuyoshi Yamashita , Noboru Masuda
- Applicant: ADVANTEST CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADVANTEST CORPORATION
- Current Assignee: ADVANTEST CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: KR2014-0031529 20140318
- Main IPC: G01R31/10
- IPC: G01R31/10 ; G01R31/28

Abstract:
Increase in number of valves complicates the configuration and control. A temperature control apparatus for controlling a temperature of a device, includes; a heat exchange section exchanging heat with the device; a main flow path causing a fluid to flow; a sub flow path causing, to flow, a fluid having a temperature different from a temperature of the fluid flowing through the main flow path; a mixture flow path merging the fluids from the main flow path and the sub flow path and causing the merged fluids to flow to the heat exchange section; and a flow rate adjusting section adjusting an amount of a fluid flowing from the sub flow path to the mixture flow path, in relation to the fluid flowing through the main flow path.
Public/Granted literature
- US20150268295A1 TEMPERATURE CONTROL APPARATUS AND TEST APPARATUS Public/Granted day:2015-09-24
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