Invention Grant
US09536705B2 Method for correcting drift of charged particle beam, and charged particle beam writing apparatus 有权
用于校正带电粒子束漂移的方法和带电粒子束写入装置

Method for correcting drift of charged particle beam, and charged particle beam writing apparatus
Abstract:
A writing apparatus includes a writing unit to include a deflector for deflecting a charged particle beam and write a pattern on a target object by the charged particle beam, a decision unit to decide a representative position of a deflection result range in which the charged particle beam was deflected with respect to a writing direction by the deflector, and a correction unit to correct drift of the charged particle beam by using a drift amount at the representative position of the deflection result range.
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