Invention Grant
US09536705B2 Method for correcting drift of charged particle beam, and charged particle beam writing apparatus
有权
用于校正带电粒子束漂移的方法和带电粒子束写入装置
- Patent Title: Method for correcting drift of charged particle beam, and charged particle beam writing apparatus
- Patent Title (中): 用于校正带电粒子束漂移的方法和带电粒子束写入装置
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Application No.: US14657613Application Date: 2015-03-13
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Publication No.: US09536705B2Publication Date: 2017-01-03
- Inventor: Osamu Iizuka
- Applicant: NUFLARE TECHNOLOGY, INC.
- Applicant Address: JP Yokohama
- Assignee: NUFLARE TECHNOLOGY, INC.
- Current Assignee: NUFLARE TECHNOLOGY, INC.
- Current Assignee Address: JP Yokohama
- Agency: Patterson & Sheridan, LLP
- Priority: JP2014-056400 20140319
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/317

Abstract:
A writing apparatus includes a writing unit to include a deflector for deflecting a charged particle beam and write a pattern on a target object by the charged particle beam, a decision unit to decide a representative position of a deflection result range in which the charged particle beam was deflected with respect to a writing direction by the deflector, and a correction unit to correct drift of the charged particle beam by using a drift amount at the representative position of the deflection result range.
Public/Granted literature
- US20150270101A1 METHOD FOR CORRECTING DRIFT OF CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM WRITING APPARATUS Public/Granted day:2015-09-24
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