Invention Grant
- Patent Title: Nozzle assembly and method for fabricating a solar cell
- Patent Title (中): 喷嘴组件及制造太阳能电池的方法
-
Application No.: US13929827Application Date: 2013-06-28
-
Publication No.: US09537031B2Publication Date: 2017-01-03
- Inventor: Shih-Wei Chen
- Applicant: TSMC Solar Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0463 ; H01L21/67

Abstract:
A method for fabricating a solar cell using a nozzle assembly that includes a base portion, a scriber coupled to the base portion, and a nozzle coupled to the base portion such that the nozzle is positioned a predefined distance from a tip of the scriber is provided. The method generally comprises positioning a substructure that includes a buffer layer and an absorber layer proximate to the base portion. A P2 line is scribed through the buffer and absorber layers of the substructure using the scriber tip. A nanoparticle solution is sprayed, using the nozzle, onto at least one portion of the buffer layer at a predefined pressure when the P2 line is being scribed through the buffer and absorber layers such that a transparent conductive oxide (TCO) layer is inhibited from forming over the portion of the buffer layer that is being sprayed with the nanoparticle solution.
Public/Granted literature
- US20150004734A1 NOZZLE ASSEMBLY AND METHOD FOR FABRICATING A SOLAR CELL Public/Granted day:2015-01-01
Information query
IPC分类: