Invention Grant
- Patent Title: Surface topography interferometer with surface color
- Patent Title (中): 表面形貌干涉仪表面颜色
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Application No.: US14174352Application Date: 2014-02-06
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Publication No.: US09541381B2Publication Date: 2017-01-10
- Inventor: Xavier Colonna de Lega
- Applicant: Zygo Corporation
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/24 ; G01B9/02 ; G01J3/50 ; G01J3/02

Abstract:
Systems and methods for generating 3D representations of shape and color texture of a test surface are described. In one aspect, surface topography interferometers are equipped with a multi-element detector and an illumination system to produce a true-color image of the measured object surface. Color information can be presented as a true-color two-dimensional image or combined with topography information to form a three-dimensional representation of the shape and color texture of the object, effectively creating for a human observer the impression of looking at the actual part.
Public/Granted literature
- US20140226150A1 SURFACE TOPOGRAPHY INTERFEROMETER WITH SURFACE COLOR Public/Granted day:2014-08-14
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