Invention Grant
- Patent Title: Ionic thermal acid generators for low temperature applications
- Patent Title (中): 用于低温应用的离子热酸发生器
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Application No.: US13691689Application Date: 2012-11-30
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Publication No.: US09541834B2Publication Date: 2017-01-10
- Inventor: Gerhard Pohlers , Cong Liu , Cheng-Bai Xu , Kevin Rowell , Irvinder Kaur
- Applicant: Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Peter F. Corless
- Main IPC: G03F7/40
- IPC: G03F7/40 ; G03F7/30 ; G03F7/09 ; G03F7/11 ; G03F7/039 ; C07D239/26 ; C07D241/12 ; C07D263/32 ; C07D277/22 ; C07C309/03 ; C07C309/06 ; C07D333/48
Abstract:
New ionic thermal acid generator compounds are provided. Also provided are photoresist compositions, antireflective coating compositions, and chemical trim overcoat compositions, and methods of using the compositions.
Public/Granted literature
- US20150212414A1 IONIC THERMAL ACID GENERATORS FOR LOW TEMPERATURE APPLICATIONS Public/Granted day:2015-07-30
Information query
IPC分类:
