Invention Grant
- Patent Title: Integrated MEMS pressure sensor and MEMS inertial sensor
- Patent Title (中): 集成MEMS压力传感器和MEMS惯性传感器
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Application No.: US14834498Application Date: 2015-08-25
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Publication No.: US09550668B1Publication Date: 2017-01-24
- Inventor: Jia Jie Xia , Nagarajan Ranganathan , Rakesh Kumar , Aveek Nath Chatterjee
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B7/02 ; B81C1/00

Abstract:
Integrated MEMS devices for pressure sensing and inertial sensing, methods for fabricating such integrated devices, and methods for fabricating vertically integrated MEMS pressure sensor/inertial sensor devices are provided. In an example, a method for fabricating an integrated device for pressure and inertial sensing includes forming a MEMS pressure sensor on a first side of a semiconductor substrate. The method further includes forming a MEMS inertial sensor on a second side of the semiconductor substrate. The second side of the semiconductor substrate is opposite the first side of the semiconductor substrate.
Information query
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