Invention Grant
- Patent Title: Method for treating a semiconductor device
- Patent Title (中): 半导体器件的处理方法
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Application No.: US15079532Application Date: 2016-03-24
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Publication No.: US09555451B2Publication Date: 2017-01-31
- Inventor: James A. Ball , Phil Waggoner , Scott Parker
- Applicant: LIFE TECHNOLOGIES CORPORATION
- Applicant Address: US CA Carlsbad
- Assignee: Life Technologies Corporation
- Current Assignee: Life Technologies Corporation
- Current Assignee Address: US CA Carlsbad
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B08B3/08 ; B08B9/08 ; C11D3/16 ; C11D3/34 ; C11D3/43 ; G01N27/414 ; C11D7/50 ; C11D7/34

Abstract:
A method of treating a sensor array including a plurality of sensors and an isolation structure, where a sensor of the plurality of sensors has a sensor pad exposed at a surface of the sensor array and the isolation structure is disposed between the sensor pad and sensor pads of other sensors of the plurality of sensors, comprises exposing the sensor pad and the isolation structure to a non-aqueous organo-silicon solution including an organo-silicon compound and a first non-aqueous carrier; applying an acid solution including an organic acid and a second non-aqueous carrier to the sensor pad; and rinsing the acid solution from the sensor pad and the isolation structure.
Public/Granted literature
- US20160279677A1 METHOD FOR TREATING A SEMICONDUCTOR DEVICE Public/Granted day:2016-09-29
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