Invention Grant
- Patent Title: Inspection method of vitreous silica crucible
- Patent Title (中): 玻璃石坩埚的检验方法
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Application No.: US14901030Application Date: 2013-06-30
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Publication No.: US09557276B2Publication Date: 2017-01-31
- Inventor: Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Masami Ohara
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- International Application: PCT/JP2013/067946 WO 20130630
- International Announcement: WO2015/001591 WO 20150108
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/95 ; G01N21/65 ; C30B15/10 ; C30B29/06 ; G01N21/3563
Abstract:
An inspection method of vitreous silica crucibles includes: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether or not a surface-defect region occurs at the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.
Public/Granted literature
- US20160202192A1 INSPECTION METHOD OF VITREOUS SILICA CRUCIBLE Public/Granted day:2016-07-14
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