Invention Grant
- Patent Title: Pressure sensor with real time health monitoring and compensation
- Patent Title (中): 压力传感器具有实时健康监测和补偿
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Application No.: US14072188Application Date: 2013-11-05
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Publication No.: US09562820B2Publication Date: 2017-02-07
- Inventor: Lei Gu , Paul D. Lucas , Stephen F. Bart , Philip W. Sullivan
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: McDermott Will & Emery LLP
- Main IPC: G01L7/08
- IPC: G01L7/08 ; G01L19/00 ; G01L9/00
Abstract:
A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
Public/Granted literature
- US20140238103A1 PRESSURE SENSOR WITH INTEGRATED HEALTH MONITORING AND COMPENSATION Public/Granted day:2014-08-28
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