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公开(公告)号：US10458870B2
公开(公告)日：2019-10-29
申请号：US15343975
申请日：2016-11-04
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Paul Lucas , Stephen F. Bart , Phillip W. Sullivan
Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
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公开(公告)号：US09562820B2
公开(公告)日：2017-02-07
申请号：US14072188
申请日：2013-11-05
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Paul D. Lucas , Stephen F. Bart , Philip W. Sullivan
CPC classification number: G01L19/0092 , G01L9/0072
Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
Abstract translation: 压力传感器可以测量气体或液体压力。 腔室可以具有接收气体或液体的入口。 柔性隔膜可以在室内，其具有在流过入口之后暴露于气体或液体的表面。 压力传感器系统可以感测由气体或液体的压力变化引起的柔性隔膜的变化。 压力敏感传感器系统可以感测柔性隔膜的不是由气体或液体的压力变化引起的变化。 压力敏感传感器系统可能对由气体或液体的压力变化引起的柔性隔膜的变化不敏感。
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公开(公告)号：US20160229688A1
公开(公告)日：2016-08-11
申请号：US14616017
申请日：2015-02-06
Applicant: MKS INSTRUMENTS, INC.
Inventor： Lei Gu , Stephen F. Bart
CPC classification number: B81B7/0048 , B81B2201/0264 , B81C1/00325 , B81C1/00547 , B81C2201/013 , H01L2224/48091 , H01L2924/00014
Abstract: Stress relief structures and methods that can be applied to MEMS sensors requiring a hermetic seal and that can be simply manufactured are disclosed. The system includes a sensor having a first surface and a second surface, the second surface being disposed away from the first surface, the second surface also being disposed away from a package surface and located between the first surface and the package surface, a number of support members, each support member extending from the second surface to the package surface, the support members being disposed on and operatively connected to only a portion of the second surface. The support member are configured to reduce stress produced by package-sensor interaction.
Abstract translation: 公开了可应用于需要气密密封并且可以简单制造的MEMS传感器的应力消除结构和方法。 所述系统包括具有第一表面和第二表面的传感器，所述第二表面远离所述第一表面设置，所述第二表面还远离封装表面设置并位于所述第一表面和所述封装表面之间， 支撑构件，每个支撑构件从第二表面延伸到包装表面，支撑构件设置在第二表面的一部分上并且可操作地连接到第二表面。 支撑构件被配置为减少由包传感器相互作用产生的应力。
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公开(公告)号：US20140318656A1
公开(公告)日：2014-10-30
申请号：US14101207
申请日：2013-12-09
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Stephen F. Bart
CPC classification number: F15D1/0005 , G01L19/0007 , G01L19/0627 , G01L19/0636 , Y10T29/49
Abstract: A pressure sensor system may sense the pressure of a gas or liquid. The system may include a housing that has an entry port for the gas or liquid; a pressure sensor within the housing; and a baffle positioned between the entry port and the pressure sensor. The baffle may have one or more inlets oriented to receive gas or liquid that enters the entry port; one or more outlets oriented to deliver the received gas or liquid to the pressure sensor; and one or more sealed flow channels that prevent the gas or liquid from escaping from the baffle, other than through the one or more outlets. At least one of the outlets may be located within no more than one millimeter of a location on the pressure sensor. The pressure sensor and baffle may be made at the same time during a process of depositing, pattering, etching, wafer bonding, and/or wafer thinning a series of layers using microelectromechanical systems (MEMS) technology.
Abstract translation: 压力传感器系统可以感测气体或液体的压力。 该系统可以包括具有用于气体或液体的入口的壳体; 壳体内的压力传感器; 以及位于入口和压力传感器之间的挡板。 挡板可以具有一个或多个入口，其定向成接收进入入口的气体或液体; 一个或多个出口定向成将接收的气体或液体输送到压力传感器; 以及一个或多个密封的流动通道，其防止气体或液体从挡板逸出，而不是通过一个或多个出口。 出口中的至少一个可以位于压力传感器上的位置不超过一毫米处。 可以在使用微机电系统（MEMS）技术的沉积，图案化，蚀刻，晶片结合和/或晶片薄化一系列层的过程的同时制造压力传感器和挡板。
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公开(公告)号：US20140238103A1
公开(公告)日：2014-08-28
申请号：US14072188
申请日：2013-11-05
Applicant: MKS INSTRUMENTS, INC.
Inventor： Lei Gu , Paul D. Lucas , Stephen F. Bart , Phillip W. Sullivan
IPC: G01L7/08
CPC classification number: G01L19/0092 , G01L9/0072
Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
Abstract translation: 压力传感器可以测量气体或液体压力。 腔室可以具有接收气体或液体的入口。 柔性隔膜可以在室内，其具有在流过入口之后暴露于气体或液体的表面。 压力传感器系统可以感测由气体或液体的压力变化引起的柔性隔膜的变化。 压力敏感传感器系统可以感测柔性隔膜的不是由气体或液体的压力变化引起的变化。 压力敏感传感器系统可能对由气体或液体的压力变化引起的柔性隔膜的变化不敏感。
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Patent Agency Ranking
公开(公告)号：US10107315B2
公开(公告)日：2018-10-23
申请号：US14101207
申请日：2013-12-09
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Stephen F. Bart
Abstract: A pressure sensor system may sense the pressure of a gas or liquid. The system may include a housing that has an entry port for the gas or liquid; a pressure sensor within the housing; and a baffle positioned between the entry port and the pressure sensor. The baffle may have one or more inlets oriented to receive gas or liquid that enters the entry port; one or more outlets oriented to deliver the received gas or liquid to the pressure sensor; and one or more sealed flow channels that prevent the gas or liquid from escaping from the baffle, other than through the one or more outlets. At least one of the outlets may be located within no more than one millimeter of a location on the pressure sensor. The pressure sensor and baffle may be made at the same time during a process of depositing, pattering, etching, wafer bonding, and/or wafer thinning a series of layers using microelectromechanical systems (MEMS) technology.
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公开(公告)号：US09850123B2
公开(公告)日：2017-12-26
申请号：US15297661
申请日：2016-10-19
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Stephen F. Bart
CPC classification number: B81B7/0048 , B81B2201/0264 , B81C1/00325 , B81C1/00547 , B81C2201/013 , H01L2224/48091 , H01L2924/00014
Abstract: Stress relief structures and methods that can be applied to MEMS sensors requiring a hermetic seal and that can be simply manufactured are disclosed. The system includes a sensor having a first surface and a second surface, the second surface being disposed away from the first surface, the second surface also being disposed away from a package surface and located between the first surface and the package surface, a number of support members, each support member extending from the second surface to the package surface, the support members being disposed on and operatively connected to only a portion of the second surface. The support member are configured to reduce stress produced by package-sensor interaction.
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公开(公告)号：US20170074742A1
公开(公告)日：2017-03-16
申请号：US15343975
申请日：2016-11-04
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Paul Lucas , Stephen F. Bart , Phillip W. Sullivan
CPC classification number: G01L9/0072 , G01L9/0042 , G01L9/0044 , G01L9/0073 , G01L9/0075 , G01L19/0092 , G01L27/002 , G01L27/007
Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
Abstract translation: 压力传感器可以测量气体或液体压力。 腔室可以具有接收气体或液体的入口。 柔性隔膜可以在室内，其具有在流过入口之后暴露于气体或液体的表面。 压力传感器系统可以感测由气体或液体的压力变化引起的柔性隔膜的变化。 压力敏感传感器系统可以感测柔性隔膜的不是由气体或液体的压力变化引起的变化。 压力敏感传感器系统可能对由气体或液体的压力变化引起的柔性隔膜的变化不敏感。
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公开(公告)号：US20170036906A1
公开(公告)日：2017-02-09
申请号：US15297661
申请日：2016-10-19
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Stephen F. Bart
CPC classification number: B81B7/0048 , B81B2201/0264 , B81C1/00325 , B81C1/00547 , B81C2201/013 , H01L2224/48091 , H01L2924/00014
Abstract: Stress relief structures and methods that can be applied to MEMS sensors requiring a hermetic seal and that can be simply manufactured are disclosed. The system includes a sensor having a first surface and a second surface, the second surface being disposed away from the first surface, the second surface also being disposed away from a package surface and located between the first surface and the package surface, a number of support members, each support member extending from the second surface to the package surface, the support members being disposed on and operatively connected to only a portion of the second surface. The support member are configured to reduce stress produced by package-sensor interaction.
Abstract translation: 公开了可应用于需要气密密封并且可以简单制造的MEMS传感器的应力消除结构和方法。 所述系统包括具有第一表面和第二表面的传感器，所述第二表面远离所述第一表面设置，所述第二表面还远离封装表面设置并位于所述第一表面和所述封装表面之间， 支撑构件，每个支撑构件从第二表面延伸到包装表面，支撑构件设置在第二表面的一部分上并且可操作地连接到第二表面。 支撑构件被配置为减少由包传感器相互作用产生的应力。
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公开(公告)号：US09499393B2
公开(公告)日：2016-11-22
申请号：US14616017
申请日：2015-02-06
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Stephen F. Bart
CPC classification number: B81B7/0048 , B81B2201/0264 , B81C1/00325 , B81C1/00547 , B81C2201/013 , H01L2224/48091 , H01L2924/00014
Abstract: Stress relief structures and methods that can be applied to MEMS sensors requiring a hermetic seal and that can be simply manufactured are disclosed. The system includes a sensor having a first surface and a second surface, the second surface being disposed away from the first surface, the second surface also being disposed away from a package surface and located between the first surface and the package surface, a number of support members, each support member extending from the second surface to the package surface, the support members being disposed on and operatively connected to only a portion of the second surface. The support member are configured to reduce stress produced by package-sensor interaction.
Abstract translation: 公开了可应用于需要气密密封并且可以简单制造的MEMS传感器的应力消除结构和方法。 所述系统包括具有第一表面和第二表面的传感器，所述第二表面远离所述第一表面设置，所述第二表面还远离封装表面设置并位于所述第一表面和所述封装表面之间， 支撑构件，每个支撑构件从第二表面延伸到包装表面，支撑构件设置在第二表面的一部分上并且可操作地连接到第二表面。 支撑构件被配置为减少由包传感器相互作用产生的应力。
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