Invention Grant
US09564288B2 Sample storage container, charged particle beam apparatus, and image acquiring method
有权
样品储存容器,带电粒子束装置和图像获取方法
- Patent Title: Sample storage container, charged particle beam apparatus, and image acquiring method
- Patent Title (中): 样品储存容器,带电粒子束装置和图像获取方法
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Application No.: US14438691Application Date: 2013-10-29
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Publication No.: US09564288B2Publication Date: 2017-02-07
- Inventor: Yusuke Ominami , Shinsuke Kawanishi , Hiroyuki Suzuki
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2012-237411 20121029
- International Application: PCT/JP2013/079296 WO 20131029
- International Announcement: WO2014/069470 WO 20140508
- Main IPC: H01J37/16
- IPC: H01J37/16 ; H01J37/20 ; H01J37/28

Abstract:
A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.
Public/Granted literature
- US20150255244A1 Sample Storage Container, Charged Particle Beam Apparatus, and Image Acquiring Method Public/Granted day:2015-09-10
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