Invention Grant
- Patent Title: Method for forming PCM and RRAM 3-D memory cells
- Patent Title (中): 用于形成PCM和RRAM 3-D存储单元的方法
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Application No.: US14967025Application Date: 2015-12-11
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Publication No.: US09570516B2Publication Date: 2017-02-14
- Inventor: Daniel Robert Shepard
- Applicant: HGST, Inc.
- Applicant Address: US CA San Jose
- Assignee: HGST, Inc.
- Current Assignee: HGST, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A method for fabricating 3-D cross-point memory arrays, and more particularly to fabricating phase change memory (PCM) and resistive RAM (ReRAM or RRAM) 3-D memory arrays having a cell size footprint of 4F2. The method for forming a plurality of layers of memory cells using a limited number of photolithographic patterning steps is applicable to memory devices having single or multiple storage bits per cell, such as cells having anywhere from one to eight bits per cell or more. These bits are stacked three dimensionally and include memory cells based on phase change material, on resistive change material, on magnetic field alignment, on mechanical switching, and on other memory cells based on other information storage technologies.
Public/Granted literature
- US20160218147A1 METHOD FOR FORMING PCM AND RRAM 3-D MEMORY CELLS Public/Granted day:2016-07-28
Information query
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