Invention Grant
- Patent Title: Particle beam forming device
- Patent Title (中): 粒子束形成装置
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Application No.: US14432948Application Date: 2013-10-17
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Publication No.: US09574984B2Publication Date: 2017-02-21
- Inventor: Naoki Takeda , Masaya Tabaru , Kazuhiro Koizumi , Noritomo Hirayama , Nobuyuki Takegawa , Takuma Miyakawa
- Applicant: FUJI ELECTRIC CO., LTD. , THE UNIVERSITY OF TOKYO
- Applicant Address: JP Kawasaki-Shi, Kanagawa JP Tokyo
- Assignee: FUJI ELECTRIC CO., LTD,THE UNIVERSITY OF TOKYO
- Current Assignee: FUJI ELECTRIC CO., LTD,THE UNIVERSITY OF TOKYO
- Current Assignee Address: JP Kawasaki-Shi, Kanagawa JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2012-264287 20121203
- International Application: PCT/JP2013/078138 WO 20131017
- International Announcement: WO2014/087746 WO 20140612
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N15/02 ; H01J49/04 ; G01N21/47

Abstract:
A particle beam forming device for forming either a linear or conical particle beam from a particle source in which particles are dispersed in a gas, includes: a reduced-pressure vessel in which pressure is reduced; a particle beam generating unit, which has one end arranged outside of the reduced-pressure vessel and an other end arranged inside the reduced-pressure vessel, and which captures the particle source from outside the reduced-pressure vessel and introduces the particle beam into the reduced-pressure vessel; and a particle beam evaluating unit for evaluating a spatial distribution of the particle beam inside the reduced-pressure vessel.
Public/Granted literature
- US20150260629A1 PARTICLE BEAM FORMING DEVICE Public/Granted day:2015-09-17
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