Invention Grant
- Patent Title: Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method
- Patent Title (中): 泵系统，二氧化碳供应系统，提取系统，光刻设备和装置制造方法
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Application No.: US13714205Application Date: 2012-12-13
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Publication No.: US09575406B2Publication Date: 2017-02-21
- Inventor: Marc Léon Van Der Gaag , Leonarda Hendrika Van Den Heuvel , Arjan Hubrecht Josef Anna Martens , Frank Johannes Jacobus Van Boxtel
- Applicant: Marc Léon Van Der Gaag , Leonarda Hendrika Van Den Heuvel , Arjan Hubrecht Josef Anna Martens , Frank Johannes Jacobus Van Boxtel
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42 ; G03F7/00 ; G03F7/20
Abstract:
An extraction system, including a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude, a pressure sensor to generate a signal indicative of a pressure of gas between the pump and the check valve, and a controller configured to generate a stop signal if a signal from the pressure sensor indicates that the pressure of gas between the pump and the check valve is below a certain magnitude.
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