Invention Grant
- Patent Title: Optical acoustic substrate assessment system and method
- Patent Title (中): 光学声学基板评估系统及方法
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Application No.: US14776953Application Date: 2014-02-05
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Publication No.: US09576862B2Publication Date: 2017-02-21
- Inventor: Todd Murray , Manjusha Mehendale , Michael Kotelyanskii , Robin Mair , Priya Mukundhan
- Applicant: RUDOLPH TECHNOLOGIES, INC. , The Regents of University of Colorado
- Applicant Address: US MN Bloomington US CO Denver
- Assignee: RUDOLPH TECHNOLOGIES, INC.,THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE
- Current Assignee: RUDOLPH TECHNOLOGIES, INC.,THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE
- Current Assignee Address: US MN Bloomington US CO Denver
- Agency: Merchant & Gould P.C.
- International Application: PCT/US2014/014890 WO 20140205
- International Announcement: WO2014/149213 WO 20140925
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/66 ; G01N29/24 ; G01N21/17 ; G01N21/95 ; G01N21/41 ; G01N29/04 ; H01L21/78 ; H01L21/02 ; G01N21/00 ; G01N21/84
Abstract:
A system and method for identifying one or more characteristics of a structure formed into a substrate is herein disclosed. Surface and bulk acoustic waves are induced in the substrate and travel past a structure of interest where the acoustic waves are sensed. Information concerning one or more characteristics of the structure is encoded in the wave. The encoded information is assessed to determine the characteristic of interest.
Public/Granted literature
- US20160043008A1 OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD Public/Granted day:2016-02-11
Information query
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