Invention Grant
- Patent Title: Heterostructure field-effect transistor
- Patent Title (中): 异质结场场效应晶体管
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Application No.: US14864680Application Date: 2015-09-24
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Publication No.: US09577048B1Publication Date: 2017-02-21
- Inventor: Ya-Yu Yang , Ping-Hao Lin
- Applicant: EPISTAR CORPORATION
- Applicant Address: TW Hsinchu
- Assignee: EPISTAR CORPORATION
- Current Assignee: EPISTAR CORPORATION
- Current Assignee Address: TW Hsinchu
- Agent Ding Yu Tan
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/205 ; H01L29/778 ; H01L29/417 ; H01L29/66 ; H01L21/31 ; H01L21/02 ; H01L21/283 ; H01L21/308 ; H01L29/20 ; H01L21/311 ; H01L21/306

Abstract:
Heterostructure field-effect transistor (HFET) having a channel layer, a barrier layer disposed on the channel layer, and a gate, source and drain electrodes disposed on the barrier layer, respectively, and corresponding fabrication methods are disclosed. The drain electrode includes a p-type semiconductor patterned structure and a raised drain section, the drain electrode includes a Schottky contact and an ohmic contact, the Schottky contact is formed between a top surface together with a side surface of p-type semiconductor patterned structure and a bottom surface together with a side surface of raised drain section, the ohmic contact is formed between another surface of raised drain section and barrier layer, the raised drain section partially surrounding the p-type semiconductor patterned structure, and a bandgap of the channel layer is less than a bandgap of the barrier layer.
Information query
IPC分类: