Invention Grant
US09580835B2 Multizone control of lamps in a conical lamphead using pyrometers
有权
使用高温计对锥形灯头中的灯进行多区域控制
- Patent Title: Multizone control of lamps in a conical lamphead using pyrometers
- Patent Title (中): 使用高温计对锥形灯头中的灯进行多区域控制
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Application No.: US14987446Application Date: 2016-01-04
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Publication No.: US09580835B2Publication Date: 2017-02-28
- Inventor: Joseph M. Ranish , Paul Brillhart , Jose Antonio Marin , Satheesh Kuppurao , Balasubramanian Ramachandran , Swaminathan T. Srinivasan , Mehmet Tugrul Samir
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: C30B25/10
- IPC: C30B25/10 ; H01L21/67 ; H01L21/02 ; C30B25/08 ; C30B25/14 ; C30B25/16 ; G01J5/10 ; H01L21/66
Abstract:
A method and apparatus for processing a semiconductor substrate is described. The apparatus is a process chamber having an optically transparent upper dome and lower dome. Vacuum is maintained in the process chamber during processing. The upper dome is thermally controlled by flowing a thermal control fluid along the upper dome outside the processing region. Thermal lamps are positioned proximate the lower dome, and thermal sensors are disposed among the lamps. The lamps are powered in zones, and a controller adjusts power to the lamp zones based on data received from the thermal sensors.
Public/Granted literature
- US20160138188A1 MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS Public/Granted day:2016-05-19
Information query
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