Invention Grant
US09581468B2 Methods for fabricating apparatus having a hermetic seal 有权
用于制造具有气密密封的装置的方法

Methods for fabricating apparatus having a hermetic seal
Abstract:
Methods for fabricating a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.
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