Invention Grant
- Patent Title: Methods for fabricating apparatus having a hermetic seal
- Patent Title (中): 用于制造具有气密密封的装置的方法
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Application No.: US14170355Application Date: 2014-01-31
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Publication No.: US09581468B2Publication Date: 2017-02-28
- Inventor: Tom T. Nguyen
- Applicant: DunAn Sensing LLC
- Applicant Address: US CA San Jose
- Assignee: DUNAN SENSING, LLC
- Current Assignee: DUNAN SENSING, LLC
- Current Assignee Address: US CA San Jose
- Agency: Hackler Daghighian Martino & Novak
- Main IPC: G01D11/24
- IPC: G01D11/24 ; H01L23/10 ; G01L19/14 ; G01L19/06 ; G01L5/16 ; B23P11/00 ; G01D11/26 ; B81B7/00 ; B81C1/00

Abstract:
Methods for fabricating a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.
Public/Granted literature
- US20150217416A1 Methods for Fabricating Apparatus Having a Hermetic Seal Public/Granted day:2015-08-06
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