Invention Grant
US09588142B2 Electronic device handling apparatus and electronic device testing apparatus 有权
电子装置处理装置和电子装置试验装置

Electronic device handling apparatus and electronic device testing apparatus
Abstract:
Provided is an electronic device handling apparatus capable of increasing the number of simultaneous measurements while suppressing the increase in cost. An electronic device handling apparatus, which moves bare dies relative to a probe card, includes: a thermal head which includes a plurality of holding regions each of which holds the bare die and has openings; at least one lift unit which is movably held by the thermal head so as to correspond to the holding regions and is able to advance and retreat through the openings; a moving device which moves the thermal head; and a fixed arm which is able to support the one lift unit.
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