Invention Grant
US09589766B2 Apparatus and method for calculating drawing speeds of a charged particle beam
有权
用于计算带电粒子束的绘制速度的装置和方法
- Patent Title: Apparatus and method for calculating drawing speeds of a charged particle beam
- Patent Title (中): 用于计算带电粒子束的绘制速度的装置和方法
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Application No.: US14717444Application Date: 2015-05-20
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Publication No.: US09589766B2Publication Date: 2017-03-07
- Inventor: Hideyuki Tsurumaki
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-131516 20140626
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/302

Abstract:
A charged particle beam drawing apparatus has a drawing unit that directs a charged particle beam and draws a pattern on a target and also has a control calculator that controls the drawing unit. The control calculator has a speed calculating unit configured to calculate a first drawing speed in a first area in a drawing area on the target according to a run-up start coordinate, a drawing start coordinate, and a predetermined first acceleration, and calculate the range of the first area according to the run-up start coordinate, the first acceleration, and a second drawing speed, and also has a drawing control unit configured to control the drawing unit so that, in the first area, drawing is performed at the first drawing speed and, in a second area that follows the first area, drawing is performed at the second drawing speed.
Public/Granted literature
- US20150380213A1 CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHOD Public/Granted day:2015-12-31
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