Invention Grant
US09589766B2 Apparatus and method for calculating drawing speeds of a charged particle beam 有权
用于计算带电粒子束的绘制速度的装置和方法

Apparatus and method for calculating drawing speeds of a charged particle beam
Abstract:
A charged particle beam drawing apparatus has a drawing unit that directs a charged particle beam and draws a pattern on a target and also has a control calculator that controls the drawing unit. The control calculator has a speed calculating unit configured to calculate a first drawing speed in a first area in a drawing area on the target according to a run-up start coordinate, a drawing start coordinate, and a predetermined first acceleration, and calculate the range of the first area according to the run-up start coordinate, the first acceleration, and a second drawing speed, and also has a drawing control unit configured to control the drawing unit so that, in the first area, drawing is performed at the first drawing speed and, in a second area that follows the first area, drawing is performed at the second drawing speed.
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