Invention Grant
US09595554B2 Sensor arrangement with a silicon-based optical sensor and a substrate for functional layer systems 有权
传感器布置与硅基光学传感器和功能层系统的基板

Sensor arrangement with a silicon-based optical sensor and a substrate for functional layer systems
Abstract:
A sensor arrangement with a silicon-based optical sensor, particularly color sensors for colorimetric applications is disclosed. The invention aims to find a novel possibility for suppressing interference ripples occurring in optical sensors when adding substrates with optically functional coatings which permits a simple production without complicated adaptation layers. The sensor passivation is composed of a combination of thin SiO2 layer in the range of 5 to 10 nm and an antireflection-matched Si3N4 layer and a substrate which carries at least one optical filter is arranged over the sensor passivation and connected to the sensor by means of an adhesive and forms an intermediate space between sensor surface and optical filter which is filled with an optical medium having a low refractive index (n2) and a height variation (Δh) over the associated sensor surface.
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