Invention Grant
- Patent Title: Optical inspection system and method
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Application No.: US14246790Application Date: 2014-04-07
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Publication No.: US09599572B2Publication Date: 2017-03-21
- Inventor: Ronen Levy , Ofer Saphier , Ariel Danan
- Applicant: ORBOTECH LTD.
- Applicant Address: IL Yavne
- Assignee: Orbotech Ltd.
- Current Assignee: Orbotech Ltd.
- Current Assignee Address: IL Yavne
- Agency: Sughrue Mion, PLLC
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.
Public/Granted literature
- US20150285734A1 OPTICAL INSPECTION SYSTEM AND METHOD Public/Granted day:2015-10-08
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