Invention Grant
- Patent Title: Imprinting device and imprinting method
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Application No.: US14359647Application Date: 2012-11-21
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Publication No.: US09606431B2Publication Date: 2017-03-28
- Inventor: Hirosuke Kawaguchi , Satoru Tanaka
- Applicant: SCIVAX CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SCIVAX CORPORATION
- Current Assignee: SCIVAX CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Factor Intellectual Property Law Group, Ltd.
- Priority: JP2011-258353 20111125
- International Application: PCT/JP2012/080245 WO 20121121
- International Announcement: WO2013/077386 WO 20130530
- Main IPC: B29C43/00
- IPC: B29C43/00 ; G03F7/00 ; B29C59/02 ; H01L21/56

Abstract:
An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.
Public/Granted literature
- US20140319718A1 IMPRINTING DEVICE AND IMPRINTING METHOD Public/Granted day:2014-10-30
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