Invention Grant
- Patent Title: Systems and methods for synchronous operation of debris-mitigation devices
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Application No.: US14325193Application Date: 2014-07-07
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Publication No.: US09609731B2Publication Date: 2017-03-28
- Inventor: Raymond Merrill, Jr. , Natale Ceglio , Daniel Stearns
- Applicant: Media Lario S.R.L.
- Applicant Address: IT Bosisio Parini (LC)
- Assignee: Media Lario SRL
- Current Assignee: Media Lario SRL
- Current Assignee Address: IT Bosisio Parini (LC)
- Agency: Opticus IP Law PLLC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
Systems and methods for synchronous operation of debris-mitigation devices (DMDs) in an EUV radiation source that emits EUV radiation and debris particles are disclosed. The methods include establishing a select relative angular orientation between the first and second DMDs that provides a maximum amount of transmission of EUV radiation between respective first and second rotatable vanes of the first and second DMDs. The methods also include rotating the first and second sets of vanes to capture at least some of the debris particles while substantially maintaining the select relative angular orientation. The systems employ DMD drive units, and an optical-based encoder disc in one of the DMD drive units measures and controls the rotational speed of the rotatable DMD vanes. Systems and methods for optimally aligning the DMDs are also disclosed.
Public/Granted literature
- US20160007435A1 SYSTEMS AND METHODS FOR SYNCHRONOUS OPERATION OF DEBRIS-MITIGATION DEVICES Public/Granted day:2016-01-07
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