Invention Grant
- Patent Title: Manufacturing facility and method of manufacturing
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Application No.: US14376955Application Date: 2013-02-06
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Publication No.: US09610602B2Publication Date: 2017-04-04
- Inventor: Ike Gerke De Vries , Hieronymus Antonius Josephus Maria Andriessen , Arjan Langen
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL Delft
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL Delft
- Agency: Banner & Witcoff, Ltd.
- Priority: EP12154222 20120207
- International Application: PCT/NL2013/050063 WO 20130206
- International Announcement: WO2013/119110 WO 20130815
- Main IPC: B05B13/02
- IPC: B05B13/02 ; H01L21/67 ; B05C9/08 ; B05C9/14 ; B05D1/38 ; B05D3/02

Abstract:
A manufacturing facility is provided for manufacturing a product on a foil (FO). The manufacturing facility comprises a deposition zone (10) formed by a clean room wherein at least a first and a second deposition facility (21, 22) are arranged for depositing a layer of a material on the foil. The manufacturing facility further comprises at least one processing facility (31) for processing the deposited layer, said processing facility being arranged outside said deposition zone and comprising a processing trajectory with a first path (31a) away from said deposition zone, towards a turning facility (41) and with a second path (31b) from said turning facility back towards said deposition zone.
Public/Granted literature
- US20150037506A1 MANUFACTURING FACILITY AND METHOD OF MANUFACTURING Public/Granted day:2015-02-05
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