Invention Grant
- Patent Title: Wafer handler and methods of manufacture
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Application No.: US14183989Application Date: 2014-02-19
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Publication No.: US09613842B2Publication Date: 2017-04-04
- Inventor: John J. Garant , Jonathan H. Griffith , Brittany L. Hedrick , Edmund J. Sprogis
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Yuanmin Cai; Andrew M. Calderon
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B32B37/00 ; B32B38/00 ; H01L21/683 ; B32B37/24 ; B32B38/10

Abstract:
A wafer handler with a removable bow compensating layer and methods of manufacture is disclosed. The method includes forming at least one layer of stressed material on a front side of a wafer handler. The method further includes forming another stressed material on a backside of the wafer handler which counter balances the at least one layer of stressed material on the front side of the wafer handler, thereby decreasing an overall bow of the wafer handler.
Public/Granted literature
- US20150235891A1 WAFER HANDLER AND METHODS OF MANUFACTURE Public/Granted day:2015-08-20
Information query
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