Invention Grant
- Patent Title: Vertical channel-type 3D semiconductor memory device and method for manufacturing the same
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Application No.: US15214372Application Date: 2016-07-19
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Publication No.: US09613981B2Publication Date: 2017-04-04
- Inventor: Zongliang Huo , Ming Liu
- Applicant: Institute of Microelectronics, Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11582 ; H01L21/764 ; H01L29/788 ; H01L29/792 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L21/02 ; H01L21/28 ; H01L21/311 ; H01L27/11519 ; H01L27/11565 ; H01L29/04 ; H01L29/16 ; H01L29/161 ; H01L29/20 ; H01L29/201 ; H01L29/49 ; H01L29/51 ; H01L21/3213 ; H01L21/324 ; H01L29/06

Abstract:
A vertical channel-type 3D semiconductor memory device and a method for manufacturing the same are disclosed. In one aspect, the method includes depositing alternating insulating and electrode layers on a substrate to form a multi-layer film. The method further includes etching the film to the substrate to form through-holes, each of which defines a channel region. The method further includes depositing barrier, storage, and tunnel layers in sequence on inner walls of through-holes to form gate stacks. The method further includes depositing and incompletely filling a channel material on a surface of the tunnel layer of gate stacks to form a hollow channels. The method further includes forming drains in contact hole regions for bit-line connection in top portions of the hollow channels. The method further includes forming sources in contact regions between the through-holes and the substrate in bottom portions of the hollow channels.
Public/Granted literature
- US20160329347A1 VERTICAL CHANNEL-TYPE 3D SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-11-10
Information query
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