Invention Grant
- Patent Title: Method for analyzing an object and charged particle beam device for carrying out the method
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Application No.: US14945902Application Date: 2015-11-19
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Publication No.: US09620331B1Publication Date: 2017-04-11
- Inventor: Sreenivas Bhattiprolu , Edward Hill
- Applicant: Carl Zeiss Microscopy Ltd. , Carl Zeiss X-ray Microscopy, Inc.
- Applicant Address: GB Cambridge US CA Pleasanton
- Assignee: Carl Zeiss Microscopy Ltd.,Carl Zeiss X-ray Microscopy, Inc.
- Current Assignee: Carl Zeiss Microscopy Ltd.,Carl Zeiss X-ray Microscopy, Inc.
- Current Assignee Address: GB Cambridge US CA Pleasanton
- Agency: Muirhead and Saturnelli, LLC
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/26

Abstract:
The system described herein relates to analyzing an object using a charged particle beam device generating a beam of charged particles and to the charged particle beam device for analyzing the object. A part of an image of the object corresponding to a volume unit surface of a volume unit is segmented into an area having a first color level and a second color level as well corresponding area fractions are determined. A plurality of particles with color levels are identified by comparing the color levels with the information stored in a database. By comparing the color levels, it is possible to identify the potential particles, for example minerals, which may be included in the volume unit.
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