Invention Grant
- Patent Title: Fluid handling structure, a lithographic apparatus and a device manufacturing method
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Application No.: US13610626Application Date: 2012-09-11
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Publication No.: US09625829B2Publication Date: 2017-04-18
- Inventor: David Bessems , Cornelius Maria Rops
- Applicant: David Bessems , Cornelius Maria Rops
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20

Abstract:
A fluid handling structure for a lithographic apparatus has, at a boundary of a space configured to contain immersion fluid to a region external to the fluid handling structure, a gas supply opening radially outward of the space, a fluid recovery opening radially outward of the gas supply opening, and a damper surface extending at least 0.5 mm radially outwards from the fluid recovery opening along the undersurface of the fluid handling structure.
Public/Granted literature
- US20130070220A1 FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD Public/Granted day:2013-03-21
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