Invention Grant
- Patent Title: Methods of fabricating micro- and nanostructure arrays and structures formed therefrom
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Application No.: US14568576Application Date: 2014-12-12
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Publication No.: US09627199B2Publication Date: 2017-04-18
- Inventor: Abhishek Motayed , Sergiy Krylyuk , Albert V. Davydov , Matthew King , Jong-Yoon Ha
- Applicant: University of Maryland, College Park , Northrop Grumman Systems Corporation , The United States of America, as Represented by the Secretary of Commerce
- Applicant Address: US MD College Park US VA Falls Church US DC Washington
- Assignee: University of Maryland, College Park,Northrop Grumman Systems Corporation,The United States of America, as represented by the Secretary of Commerce, National Institute of Standards and Technology
- Current Assignee: University of Maryland, College Park,Northrop Grumman Systems Corporation,The United States of America, as represented by the Secretary of Commerce, National Institute of Standards and Technology
- Current Assignee Address: US MD College Park US VA Falls Church US DC Washington
- Agency: AuerbachSchrot LLC
- Agent William C. Schrot
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L33/00 ; H01L21/306 ; H01L21/3065 ; H01L33/18 ; H01L33/32
Abstract:
Methods of fabricating micro- and nanostructures comprise top-down etching of lithographically patterned GaN layer to form an array of micro- or nanopillar structures, followed by selective growth of GaN shells over the pillar structures via selective epitaxy. Also provided are methods of forming micro- and nanodisk structures and microstructures formed from thereby.
Public/Granted literature
- US20150170901A1 Methods of Fabricating Micro- and Nanostructure Arrays and Structures Formed Therefrom Public/Granted day:2015-06-18
Information query
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