Invention Grant
- Patent Title: CMOS compatible fuse or resistor using self-aligned contacts
-
Application No.: US14835381Application Date: 2015-08-25
-
Publication No.: US09627373B2Publication Date: 2017-04-18
- Inventor: Veeraraghavan S. Basker , Kangguo Cheng , Theodorus E. Standaert , Junli Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/06 ; H01L23/525 ; H01L49/02 ; H01L29/66 ; H01L29/45 ; H01L21/8234

Abstract:
A semiconductor device includes dummy gate structures formed on a dielectric layer over a substrate and forming a gap therebetween. A trench silicide structure is formed in the gap on the dielectric layer and extends longitudinally beyond the gap on end portions. The trench silicide structure forms a resistive element. Self-aligned contacts are formed through an interlevel dielectric layer and land on the trench silicide structure beyond the gap on the end portions.
Public/Granted literature
- US20170062409A1 CMOS COMPATIBLE FUSE OR RESISTOR USING SELF-ALIGNED CONTACTS Public/Granted day:2017-03-02
Information query
IPC分类: