Invention Grant
- Patent Title: Imprint lithography
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Application No.: US13026574Application Date: 2011-02-14
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Publication No.: US09645489B2Publication Date: 2017-05-09
- Inventor: Jeroen Herman Lammers , Sander Frederik Wuister , Roelof Koole
- Applicant: Jeroen Herman Lammers , Sander Frederik Wuister , Roelof Koole
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: B32B33/00
- IPC: B32B33/00 ; B29C59/02 ; G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
An imprint lithography template is disclosed. The imprint lithography template includes a plurality of pattern features extending from a plane of a body of the imprint lithography template, and away from that body, the pattern features to be used to apply a pattern into an imprintable medium. The imprint lithography template further includes a plurality of assist features in the form of recesses extending from the plane of that body of the imprint lithography template, and into that body. A method for forming the assist features in the imprint lithography template, using self-assembled block copolymers as an etch resist, is also disclosed.
Public/Granted literature
- US20110200795A1 IMPRINT LITHOGRAPHY Public/Granted day:2011-08-18
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