Invention Grant
- Patent Title: Yaw rate sensor having three sensitive axes and method for manufacturing a yaw rate sensor
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Application No.: US14313428Application Date: 2014-06-24
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Publication No.: US09651377B2Publication Date: 2017-05-16
- Inventor: Thorsten Balslink , Hendrik Specht , Johannes Classen
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agent Gerard Messina
- Priority: DE102013212112 20130625
- Main IPC: G01C19/5769
- IPC: G01C19/5769 ; G01C19/5747 ; G01C19/5712

Abstract:
A yaw rate sensor includes: a first sensor structure having a first oscillating mass and configured to detect a first yaw rate around a first axis of rotation; a second sensor structure having a second oscillating mass and configured to detect second and third yaw rates around second and third axes of rotation, respectively; and a drive structure coupled to the first and second oscillating masses. The first oscillating mass is drivable into a first drive oscillation along a first oscillation direction, and the second oscillating mass is drivable into a second drive oscillation along a second oscillation direction different from the first oscillation direction. The first axis of rotation is perpendicular to the first oscillation direction, and the second and third axes of rotation are perpendicular to the second oscillation direction.
Public/Granted literature
- US20140373628A1 YAW RATE SENSOR HAVING THREE SENSITIVE AXES AND METHOD FOR MANUFACTURING A YAW RATE SENSOR Public/Granted day:2014-12-25
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