Invention Grant
- Patent Title: Scanning particle microscope having an energy selective detector system
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Application No.: US14252034Application Date: 2014-04-14
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Publication No.: US09653255B2Publication Date: 2017-05-16
- Inventor: Stefan Schubert
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102013006535 20130415
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28

Abstract:
The disclosure provides a scanning particle beam microscope for inspecting an object. The scanning particle beam microscope includes a particle optical system having an objective lens. The microscope further includes a detector system having a particle optical detector component configured to generate an electrostatic field in the beam path of particles emitted from the object. The detector system is configured to spatially filter the emitted particles after the emitted particles have passed through the electrostatic field and to detect a portion of the filtered emitted particles. The particle optical detector component is configured such that the spatial filtering filters the emitted particles according to a kinetic energy of the emitted particles.
Public/Granted literature
- US20140306110A1 SCANNING PARTICLE MICROSCOPE HAVING AN ENERGY SELECTIVE DETECTOR SYSTEM Public/Granted day:2014-10-16
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