Ion optics devices and related methods of making and using the same are disclosed herein that generally involve forming a plurality of electrode structures on a single substrate. An aspect ratio of the structures relative to a plurality of recesses which separate the structures can be selected so as to substantially prevent ions passing through the finished device from contacting exposed, electrically-insulating portions of the substrate. The substrate material can be a material that is relatively inexpensive and easy to machine into complex shapes with high precision (e.g., a printed circuit board material). In some embodiments, discrete ion optical elements are disclosed which can be formed from a core material to which an electrically-conductive coating is applied, the core material being relatively inexpensive and easy to machine with high precision. The coating can be configured to substantially prevent outgassing from the core under the vacuum conditions typically experienced in a mass spectrometer.