Invention Grant
- Patent Title: Method for manufacturing component built-in substrate
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Application No.: US15138329Application Date: 2016-04-26
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Publication No.: US09653380B2Publication Date: 2017-05-16
- Inventor: Makoto Suwada , Mitsutaka Yamada , Masumi Suzuki , Michimasa Aoki , Keizou Takemura , Shinichirou Okamoto , Kenji Katsumata , Jie Wei
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki
- Agency: Fujitsu Patent Center
- Priority: JP2015-106297 20150526
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L23/473 ; H01L23/367 ; H01L23/427 ; H01L23/00 ; H01L25/065

Abstract:
A substrate is disclosed, which can remove heat from a stacked body of semiconductor elements through a phase change of a coolant. The substrate of the application includes: a stacked body of semiconductor elements; a first channel forming a path, receiving circulation of a first coolant, in a surface of the stacked body; and a second channel forming a path, receiving circulation of a second coolant having a boiling point higher than the boiling point of the first coolant, in an inter-layer portion of the stacked body.
Public/Granted literature
- US20160351471A1 METHOD FOR MANUFACTURING COMPONENT BUILT-IN SUBSTRATE Public/Granted day:2016-12-01
Information query
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