Invention Grant
- Patent Title: Target for spark vaporization with physical limiting of the propagation of the spark
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Application No.: US13641499Application Date: 2011-01-10
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Publication No.: US09657389B2Publication Date: 2017-05-23
- Inventor: Siegfried Krassnitzer , Juerg Hagmann
- Applicant: Siegfried Krassnitzer , Juerg Hagmann
- Applicant Address: CH Pfäffikon SZ
- Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee Address: CH Pfäffikon SZ
- Agency: Pearne & Gordon LLP
- Priority: DE102010020737U 20100517
- International Application: PCT/EP2011/000057 WO 20110110
- International Announcement: WO2011/128004 WO 20111020
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/32 ; H01J37/305 ; H01J37/32
Abstract:
The present invention relates to a target for an ARC source having a first body (3) of a material to be vaporized, which essentially comprises in one plane a surface which is intended to be vaporized, wherein the surface surrounds in this plane a central area, characterized in that in the central area a second body (7) is provided, which is preferably in the form of a disk and is electrically isolated from the first body (3), in such a way that the second body (7) can essentially provide no electrons for maintaining a spark.
Public/Granted literature
- US20130126348A1 TARGET FOR SPARK VAPORIZATION WITH PHYSICAL LIMITING OF THE PROPAGATION OF THE SPARK Public/Granted day:2013-05-23
Information query
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