Invention Grant
- Patent Title: X-ray analyzer
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Application No.: US14662906Application Date: 2015-03-19
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Publication No.: US09658175B2Publication Date: 2017-05-23
- Inventor: Ryusuke Hirose
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Brinks Gilson & Lione
- Priority: JP2014-058390 20140320
- Main IPC: G01N23/223
- IPC: G01N23/223

Abstract:
An X-ray analyzer is provided with: a sample stage on which a sample is disposed; an X-ray source configured to irradiate the sample with a primary X-ray at a first angle; a detector configured to detect a secondary X-ray generated from the sample; a position adjustment mechanism configured to adjust a relative position between the sample stage and the primary X-ray; a first light source configured to emit a first light beam at a second angle toward a focal position of the primary X-ray or toward a predetermined position; and a second light source configured to emit a second light beam at a third angle toward the focal position or toward the predetermined position, wherein the first light beam and the second light beam are configured to have visibility sufficient for enabling visual distinction.
Public/Granted literature
- US20150268180A1 X-RAY ANALYZER Public/Granted day:2015-09-24
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