Invention Grant
- Patent Title: Support cylinder for thermal processing chamber
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Application No.: US15188706Application Date: 2016-06-21
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Publication No.: US09659809B2Publication Date: 2017-05-23
- Inventor: Mehran Behdjat , Aaron Muir Hunter , Joseph M. Ranish , Norman Tam , Jeffrey Tobin , Jiping Li , Martin Tran
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/324 ; H01L21/67

Abstract:
Embodiments of the disclosure generally relate to a support cylinder used in a thermal process chamber. In one embodiment, the support cylinder includes a hollow cylindrical body comprising an inner peripheral surface, an outer peripheral surface parallel to the inner peripheral surface, wherein the inner peripheral surface and the outer peripheral surface extend along a direction parallel to a longitudinal axis of the support cylinder, and a lateral portion extending radially from the outer peripheral surface to the inner peripheral surface, wherein the lateral portion comprises a first end having a first beveled portion, a first rounded portion, and a first planar portion connecting the first beveled portion and the first rounded portion, and a second end opposing the first end, the second end having a second beveled portion, a second rounded portion, and a second planar portion connecting the second beveled portion and the second rounded portion.
Public/Granted literature
- US20160300752A1 SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER Public/Granted day:2016-10-13
Information query
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