- Patent Title: Temperature measurement method for ultraviolet light transmittance member, temperature measurement device for ultraviolet light transmittance member, and light source device
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Application No.: US15191871Application Date: 2016-06-24
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Publication No.: US09671290B2Publication Date: 2017-06-06
- Inventor: Masafumi Mizuguchi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2013-271308 20131227
- Main IPC: G01J5/10
- IPC: G01J5/10 ; G01J5/00 ; G01K11/12
Abstract:
There is provided a temperature measurement method for measuring a temperature of an ultraviolet light transmittance member transmitting ultraviolet light. The method includes: detecting ultraviolet light transmitted through the ultraviolet light transmittance member using a spectroscopic measurement unit, and obtaining an absorption edge wavelength of the ultraviolet light transmittance member; and deriving a temperature of the ultraviolet light transmittance member on the basis of the obtained absorption edge wavelength.
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