Invention Grant
- Patent Title: Nanowire manufacturing kit having nanowire manufacturing substrate and nanowire adhesive film and nanowire manufactured using the same
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Application No.: US14444740Application Date: 2014-07-28
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Publication No.: US09695499B2Publication Date: 2017-07-04
- Inventor: Young Jae Lee , Kyoung Jong Yoo , Jun Lee , Jin Su Kim , Jae Wan Park
- Applicant: LG INNOTEK CO., LTD.
- Applicant Address: KR Seoul
- Assignee: LG INNOTEK CO., LTD.
- Current Assignee: LG INNOTEK CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2011-0063528 20110629
- Main IPC: C23C14/00
- IPC: C23C14/00 ; H01L29/06 ; C30B11/12 ; C30B29/60 ; B22F9/16 ; C04B35/622 ; B82Y10/00 ; B22F1/00 ; C23C16/01 ; B82Y30/00 ; B82Y40/00 ; H01L29/66 ; H01L29/775

Abstract:
Provided is a nanowire manufacturing substrate, comprising a grid base layer on a substrate and a grid pattern formed by patterning the grid base layer, the grid pattern being disposed to produce a nanowire on a surface thereof. According to the present invention, the width and height of the nanowire can be adjusted by controlling the wet-etching process time period, and the nanowire can be manufactured at a room temperature at low cost, the nanowire can be mass-manufactured and the nanowire with regularity can be manufactured even in case of mass production.
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