Invention Grant
- Patent Title: Lithographic apparatus
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Application No.: US14399870Application Date: 2013-05-02
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Publication No.: US09696640B2Publication Date: 2017-07-04
- Inventor: Adrianus Hendrik Koevoets , Theodorus Petrus Maria Cadee , Harmeet Singh
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2013/059157 WO 20130502
- International Announcement: WO2013/167463 WO 20131114
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/52 ; G03F7/20

Abstract:
A lithographic apparatus including a first body including a heat source, a second body and a heater device is presented. The second body has a facing surface facing the first body via a gap between the first and second bodies. The heat source is for providing a heat flux to the second body via the gap. The heater device is attached to the facing surface. The heater device is configured to provide a further heat flux to the second body.
Public/Granted literature
- US20150098067A1 LITHOGRAPHIC APPARATUS Public/Granted day:2015-04-09
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