Invention Grant
- Patent Title: Mass spectrometer
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Application No.: US14980824Application Date: 2015-12-28
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Publication No.: US09697998B2Publication Date: 2017-07-04
- Inventor: Megumi Nakamura , Yoshiyuki Takizawa , Masayuki Sugiyama , Yuji Shimada , Hiroki Mita
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-Shi
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2015-026012 20150213
- Main IPC: H01J49/02
- IPC: H01J49/02

Abstract:
A mass spectrometer includes: an ionization unit configured to ionize an analyte gas; a filter unit configured to allow passage of only a target ion which is a component of the analyte gas ionized in the ionization unit and which has a specific mass-to-charge ratio; and an ion detection unit configured to detect an ion detection value based on the target ion having passed through the filter unit, wherein the ion detection unit includes a Faraday electrode which includes an electrode portion disposed along a centerline of the filter unit and a bottom electrode provided at a position downstream of the electrode portion in a flow of the target ion, the electrode portion and the bottom electrode being connected to each other, a secondary electron multiplier provided to face the electrode portion with the centerline located therebetween, and a blocking portion connected to the bottom electrode.
Public/Granted literature
- US20160240364A1 MASS SPECTROMETER Public/Granted day:2016-08-18
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