Invention Grant
- Patent Title: Controlled spalling utilizing vaporizable release layers
-
Application No.: US15173123Application Date: 2016-06-03
-
Publication No.: US09698039B2Publication Date: 2017-07-04
- Inventor: Stephen W. Bedell , Ning Li , Katherine L. Saenger
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Louis J. Percello
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L21/31 ; H01L21/469 ; H01L23/34 ; H01L21/683 ; B05D1/00
Abstract:
Method for a controlled spalling utilizing vaporizable release layers. For example, a method comprises providing a base substrate, depositing a stressor layer and a vaporizable release layer on the base substrate, forming a flexible support layer on at least one of the stressor layer and the vaporizable release layer, spalling an upper portion of the base substrate, securing the spalled upper portion of the base substrate to a handle substrate, and vaporizing the vaporizable release layer.
Public/Granted literature
- US20170110359A1 CONTROLLED SPALLING UTILIZING VAPORIZABLE RELEASE LAYERS Public/Granted day:2017-04-20
Information query
IPC分类:
