Invention Grant
- Patent Title: MEMS sensor with high voltage switch
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Application No.: US14723927Application Date: 2015-05-28
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Publication No.: US09708176B2Publication Date: 2017-07-18
- Inventor: Matthew Thompson , Joseph Seeger
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: Invensense, Inc.
- Current Assignee: Invensense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Maynard Cooper & Gale, LLP
- Agent Joshua V. Van Hoven, Esq.
- Main IPC: B81B3/00
- IPC: B81B3/00
Abstract:
A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).
Public/Granted literature
- US20160347605A1 MEMS Sensor with High Voltage Switch Public/Granted day:2016-12-01
Information query
