Invention Grant
- Patent Title: Micromechanical pressure sensor device and corresponding manufacturing method
-
Application No.: US14592610Application Date: 2015-01-08
-
Publication No.: US09709451B2Publication Date: 2017-07-18
- Inventor: Arnd Kaelberer , Jochen Reinmuth , Johannes Classen
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102014200500 20140114
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00 ; B81C1/00 ; G01P15/08 ; G01P15/125 ; B81B7/02

Abstract:
A micromechanical pressure sensor device includes: an MEMS wafer having a front side and a rear side; a first micromechanical functional layer formed above the front side of the MEMS wafer; and a second micromechanical functional layer formed above the first micromechanical functional layer. A deflectable first pressure detection electrode is formed in one of the first and second micromechanical functional layers. A fixed second pressure detection electrode is formed spaced apart from and opposite the deflectable first pressure detection electrode. An elastically deflectable diaphragm area is formed above the front side of the MEMS wafer. An external pressure is applied to the diaphragm area via an access opening in the MEMS wafer, and the wafer is connected to the deflectable first pressure detection electrode via a plug-like joining area.
Public/Granted literature
- US20150198493A1 Micromechanical pressure sensor device and corresponding manufacturing method Public/Granted day:2015-07-16
Information query